摘要 |
Processes for treating gas streams contaminated with fluorine-containing compounds, in addition to apparatuses for such treatment processes that may also be used to monitor the emission of these compounds, are disclosed. In the processes and apparatuses, catalytic conversion (pyrolysis) one or more fluorine-containing contaminants (e.g., perfluorocarbon) in the gas stream is carried out using a catalyst comprising tungstated zirconia or sulfated zirconia. The catalysts exhibit exceptional responsiveness, recovery, and/or activity, compared to conventional catalysts, for this purpose. |