UNIT FOR CONTROLLING VACUUM OF PICKERS AND PICKER APPARATUS HAVING THE UNIT

摘要

PURPOSE: The vacuum control unit of a peaker and a peaker apparatus including the same are provided to control adhesion time for a semiconductor device by selecting the diameter of orifice flow paths which is branched from a manifold. CONSTITUTION: A manifold(110) has a constant internal space. An exhaust flow path(120) discharges air in the internal space while being connected to the manifold. A supply flow path(140) supplies the air to the internal space while being connected to the manifold. An orifice flow path(150) is branched from the manifold and is individually connected to peakers(10). The orifice flow path integrally forms or destroys the vacuum of the peakers.