| 发明名称 |
Diamond semiconductor element and process for producing the same |
| 摘要 |
A process for producing a diamond thin-film characterized by comprising a first process-step of forming a diamond crystal thin-film on a substrate, and a second process-step of firing said diamond crystal thin-film thus formed under a high pressure under which a diamond is stable is disclosed. |
| 申请公布号 |
EP2400532(A2) |
申请公布日期 |
2011.12.28 |
| 申请号 |
EP20110182461 |
申请日期 |
2006.06.20 |
| 申请人 |
NIPPON TELEGRAPH AND TELEPHONE CORPORATION |
发明人 |
KASU, MAKOTO;MAKIMOTO, TOSHIKI;UEDA, KENJI;YAMAUCHI, YOSHIHARU |
| 分类号 |
H01L21/338;C23C16/27;C30B25/10;C30B29/04;C30B31/22;C30B33/02;H01L21/04;H01L21/331;H01L21/336;H01L29/04;H01L29/45;H01L29/73;H01L29/732;H01L29/786;H01L29/812;H01L33/00 |
主分类号 |
H01L21/338 |
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