| 摘要 |
<p>An inkjet print head is fabricated by forming an electrode and two protection film layers composed of an inorganic insulating film and an organic insulating film over the electrode within a groove of a piezoelectric member, adhering a top board to the piezoelectric member covering the groove to form a pressure chamber, adhering a polyimide plate to cover the groove, and then forming a nozzle in the polyimide plate by the excimer laser processing aligning to the pressure chamber. The excimer laser light penetrates the polyimide plate to form a nozzle is then emitted on the organic insulating film. Consequently, part of the organic insulating film is damaged by the laser light. To prevent this damage, the thickness of the inorganic insulating film in the part to which the excimer laser light is emitted is prepared to be 0.5 mum or more.</p> |
