| 摘要 |
Methods and systems of the invention are directed to a pressure sensor that includes a substrate, a first conductive plate, and a second conductive plate. The substrate is formed of a material having a low coefficient of thermal expansion (CTE). The first conductive plate is formed of a material having a CTE that is higher than the CTE of the substrate, and is attached to a first surface of the substrate. The second conductive plate is rotatably connected to the substrate through a hinge, and includes a portion that is adjacent to the first conductive plate. |
