发明名称 |
MEMBER FOR CLEANING PERFORMANCE EVALUATION, AND CLEANING PERFORMANCE EVALUATION METHOD |
摘要 |
<P>PROBLEM TO BE SOLVED: To provide a member for cleaning performance evaluation and a cleaning performance evaluation method which can easily evaluate cleaning performance at the time of washing an object to be washed which has a hole. <P>SOLUTION: A member for cleaning performance evaluation (10) in which a mimetic hole (50) is formed is immersed in a washing liquid (70) in a cleaning tank (72); while irradiating an ultrasonic wave at the washing liquid (70) in the cleaning tank (72), vacuum and atmosphere opening in the cleaning tank (72) are repeated, and thereby the member for cleaning performance evaluation (10) is washed; and cleaning performance of the member for cleaning performance evaluation (10) is evaluated based on liquid permeability ability or liquid exchange performance after the end of the washing process. <P>COPYRIGHT: (C)2012,JPO&INPIT |
申请公布号 |
JP2011255344(A) |
申请公布日期 |
2011.12.22 |
申请号 |
JP20100133871 |
申请日期 |
2010.06.11 |
申请人 |
HITACHI PLANT TECHNOLOGIES LTD |
发明人 |
MASAKI HIROSHI;SAWARA TERUTAKA;TSUMAKI NOBUO |
分类号 |
B08B3/08;C23G1/00;H01L21/304 |
主分类号 |
B08B3/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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