| 摘要 |
Disclosed herein is a machining error corrector method using optical pickup. The machining error corrector method using optical pickup according to the present invention includes: calculating absolute coordinates by identifying alignment marks formed at edges of a plate-shaped substrate that is a workpiece to be machined by laser; storing the calculated absolute coordinates as reference position information; moving a plurality of optical pickup units according to a horizontal or vertical direction patterns formed on the plate-shaped substrate; storing the coordinates of the patterns detected by the plurality of optical pickup units as error position information; and correcting actual machining position information by comparing the reference position information with the error position information, thereby making it possible to remarkably improve the substrate machining rate using laser, or the like.
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