VERTICAL TYPE ROBOT FOR TRANSFERRING A SUBSTRATE

摘要

PURPOSE: A vertical type substrate transfer robot is provided to improve productivity by transferring two and more substrates at the same time and reducing a tact time and to reduce the generation of particles which is created by friction with a tray which support the substrate. CONSTITUTION: A robot main body(110) comprises a robot frame(111), a robot body(112), a robot arm(113), and an arm guide(114). The robot arm interlinks the robot body and a vertical type substrate tray(120). The arm guide guides a motion of the robot arm. A gripping unit(130) grips a substrate on the vertical type substrate tray. The gripping unit comprises a first gripper which grips a supporting member and the substrate. A rack gear is prepared in the vertical type substrate tray according to a direction in which the substrate stands.