| 摘要 |
<P>PROBLEM TO BE SOLVED: To secure rigidity of a pellicle container, especially rigidity and flatness of a carrying board, without using a reinforcing plate and to prevent an occurence of wrinkle of a pellicle film in carrying a pellicle. <P>SOLUTION: A pellicle container 21 comprises: a tray 2 for carrying a pellicle 4 on which a pellicle film is stretched over one edge surface of a pellicle frame body; and a lid 3 for covering the tray 2 from an upper side. The tray 2 includes: a tray central bottom 5; a carrying board 6 in an approximately-squared ring form that bulges from the tray central bottom 5 to the upper side to carry the pellicle 4; and an extensive part 7a (fitting part 7) that extends from an outer peripheral edge of the carrying board 6 toward a horizontal direction. Buffer parts 8 and 9 are respectively provided between the tray central bottom 5 and the carrying board 6, and between the carrying board 6 and a most extensive part 7b (fitting part 7). <P>COPYRIGHT: (C)2012,JPO&INPIT |
