THIN FILM THICKNESS CONTROL DEPOSITION SYSTEM FOR IMPROVING THIN FILM UNIFORMITY

摘要

PURPOSE: A thin film deposition apparatus for improve the accuracy of the thickness control of a thin film is provided to allow a measurement sensor to accurately monitor and measure the injection amount of deposition materials. CONSTITUTION: A thin film deposition apparatus for improve the accuracy of the thickness control of a thin film comprises a distribution pipe(103), multiple injection nozzles(104), one or more measurement nozzles(204), nozzle caps, a measurement sensor(207), and a chopper. The distribution pipe has multiple inlets. The injection nozzles are connected to the inlets of the distribution pipe and inject deposition materials in a direction. The measurement nozzles inject deposition materials in the other direction. The nozzle caps are detachably formed in the injection nozzles. The measurement sensor is formed in a horizontal line to the measurement nozzles. The chopper is formed between the measurement nozzles and the measurement sensor and controls the flow rate of the deposition materials.