| 摘要 |
<P>PROBLEM TO BE SOLVED: To reduce dark count in light intensity measurement using an avalanche photodiode (APD). <P>SOLUTION: In light detecting apparatus and method using APD, when a first reverse bias voltage is applied to APD at first temperature to perform a light intensity measurement, (1) the temperature of APD or the reverse bias voltage applied to APD is set to be higher than the first temperature or the first reverse bias voltage by 20 K or 10 V or more, and held for a predetermined time, for example 60 seconds, or more, (2) the increased temperature or reverse bias voltage of APD is reduced to the first temperature or the first reverse bias voltage, and then (3) the light intensity measurement is performed by a photon counting method or the like, or a controller for performing the light intensity measurement is provided. In order to heat APD, (4) a circuit for making forward bias current flow through APD is provided to make forward bias current flow, (5) APD is heated by a heating element adjacent to APD, and (6) APD is irradiated with light to optically heat APD. <P>COPYRIGHT: (C)2012,JPO&INPIT |
