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发明名称
Method of fabricating phase shift mask
摘要
<p>본 발명의 위상반전마스크의 형성방법은, 투광기판 위에 위상반전막패턴 및 광차단막패턴을 형성하는 단계와, 위상반전막패턴의 시디를 측정하는 단계와, 측정된 시디가 설계시디보다 큰 경우 투광기판의 노출면 위에 보호막을 증착하는 단계와, 위상반전막패턴의 시디 보정을 위한 식각을 수행하는 단계와, 그리고 광차단막패턴 및 보호막을 제거하는 단계를 포함한다.</p>
申请公布号
KR101096253(B1)
申请公布日期
2011.12.22
申请号
KR20090053071
申请日期
2009.06.15
申请人
发明人
分类号
H01L21/027
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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