| 摘要 |
<p>An ultraviolet laser device is provided with a laser beam output unit including an ytterbium-doped fiber optical amplifier, a thulium-doped fiber optical amplifier, and an ytterbium-doped fiber optical amplifier or an erbium-doped fiber optical amplifier which respectively output first to third infrared laser beams, and a wavelength conversion unit including first to third optical lines through which the first to the third infrared laser beams are propagated and outputted as first to third laser beams, and a fourth optical line through which the first to the third laser beams are propagated after being combined. The first optical line wavelength-converts the first infrared laser beam into a predetermined harmonic and generates the predetermined harmonic as the first laser beam, and the fourth optical line includes a first wavelength conversion optical element which generates a previous-stage ultraviolet laser beam by sum frequency generation between the predetermined harmonic and the second laser beam, and a second wavelength conversion optical element which generates an ultraviolet laser beam by sum frequency generation between the previous-stage ultraviolet laser beam and the third laser beam.</p> |
