| 摘要 |
<p>PURPOSE:To ensure the achievement of a production scheme by evaluating the extent of a production progress for every stage of different products through the collation of a prediction result available from a production site with the result of planning, and making production control whenever necessary through the comparison of evaluation results with each product type and process. CONSTITUTION:A production progress evaluation part 3 collates the result of planning from a planning memory 1 with the result of prediction from a predicting part 2, and evaluates a relative progress extent showing the present condition of a production progress for processes A, B, C and D of each wafer X, Y and Z. The result of the evaluation is transferred to a commanding part 4 for a priority order. Then, the commanding part 4 makes comparison among indexes from said evaluation part 3 about every process of A, B, C and D for each wafer X, Y and Z, determines the priority order thereof and instructs a transfer device 8 about a production progress thereafter. Then, according to the instruction, the device 8 transfers the wafer X of the first priority from a storage part 9 to the C-process and the wafer Z of the second priority to the B-process respectively. Thereafter, production continues while determining the order of priority about each process of wafers, thereby enabling the progress of work along an ideal line.</p> |
