发明名称 COMPOSITE SUBSTRATE
摘要 <p>Disclosed is a composite substrate provided with a piezoelectric substrate, a support substrate made of spinel, and an organic adhesive layer for adhering the piezoelectric substrate and the support substrate, wherein the support substrate comprises an adhesive surface to be adhered to the piezoelectric substrate and the adhesive surface has an Rt (maximum cross sectional height of a roughness curve) of 5 nm or more and 50 nm or less.</p>
申请公布号 WO2011158636(A1) 申请公布日期 2011.12.22
申请号 WO2011JP62246 申请日期 2011.05.27
申请人 NGK INSULATORS, LTD.;SUZUKI, KENJI 发明人 SUZUKI, KENJI
分类号 H03H9/25;H01L41/18;H01L41/22 主分类号 H03H9/25
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