| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a manufacturing method of a thin film solar cell capable of suppressing film drop of a photoelectric conversion layer. <P>SOLUTION: In the manufacturing method of the thin film solar cell, the thin film is formed on a substrate through an opening provided on a frame body installing the substrate. The method includes a process for forming a first photoelectric conversion layer which laminates a first semiconductor film 3 on a substrate 1 using a first frame body 11 and a process for forming a second photoelectric conversion layer which laminates a second semiconductor film 4 on the first semiconductor film 3 using a second frame body 15, where an area of the opening of the second frame body 15 is smaller than an area of an opening of the first frame body 11. <P>COPYRIGHT: (C)2012,JPO&INPIT |
