CERAMIC SPUTTERING TARGET ASSEMBLY AND A METHOD FOR PRODUCING THE SAME

摘要

A METHOD FOR PRODUCING A CERAMIC, SPUTTERING TARGET ASSEMBLY HAS STEPS OF PROVIDING A BACKING PLATE (10) AND FORMING A SOLDER LAYER (11) ON A SURFACE OF THE BACKING PLATE (10); PROVIDING A CERAMIC TARGET (20) AND FORMING AN INTERFACE LAYER (21) ON A SURFACE OF THE CERAMIC TARGET (20); ANNEALING THE CERAMIC TARGET (20) WITH THE INTERFACE LAYER (21); AND SOLDER-BONDING THE SOLDER LAYER (11) OF THE BACKING PLATE (10) AND THE INTERFACE LAYER (21) OF THE CERAMIC TARGET (20) TO OBTAIN THE CERAMIC SPUTTERING TARGET ASSEMBLY. BY ANNEALING THE INTERFACE LAYER (21) MADE OF CHROMIUM OR CHROMIUM-CONTAINING ALLOY, THE INTERFACE LAYER (21) PROVIDES EXCELLENT ADHESIVE ABILITY TO SOLDER-BONDING THE SOLDER LAYER (11) AND ALLOWS THE CERAMIC TARGET (20) AND THE BACKING PLATE (10) TO BE COMBINED SECURELY.