发明名称 |
Electrostatic chuck with anti-reflective coating, measuring method and use of said chuck |
摘要 |
The embodiments disclosed herein relate to an electrostatic chuck, or an optically structured element or an optical mask that comprise a metal film as well as a transparent cover applied on a substrate. At least two anti-reflective films are inserted between the metal film and the cover that reduce the reflectance of the metal film, as viewed from the surface, to almost zero. As a result, a direct interferometer measurement of the surface structure of the transparent cover is possible. Methods of measurement and of use are also disclosed. |
申请公布号 |
US8081317(B2) |
申请公布日期 |
2011.12.20 |
申请号 |
US20090436252 |
申请日期 |
2009.05.06 |
申请人 |
KALKOWSKI GERHARD;STENZEL OLAF;STOECKL WIELAND;FRAUNHOFER-GESELLSCHAFT ZUR FORDERUNG DER ANGEWANDTEN FORSCHUNG E.V. |
发明人 |
KALKOWSKI GERHARD;STENZEL OLAF;STOECKL WIELAND |
分类号 |
G01B11/02;F23Q3/00 |
主分类号 |
G01B11/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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