首页
产品
黄页
商标
征信
会员服务
注册
登录
全部
|
企业名
|
法人/股东/高管
|
品牌/产品
|
地址
|
经营范围
发明名称
PLASMA ETCHING APPARATUS AND PLASMA ETCHING METHOD
摘要
申请公布号
KR101094982(B1)
申请公布日期
2011.12.20
申请号
KR20107019000
申请日期
2009.02.26
申请人
发明人
分类号
H01L21/3065
主分类号
H01L21/3065
代理机构
代理人
主权项
地址
您可能感兴趣的专利
CIRCUIT MATERIALS, CIRCUIT LAMINATES, AND METHODS OF MANUFACTURE THEREOF
METHOD AND APPARATUS FOR TRANSMITTING UPLINK SIGNALS USING MULTI-ANTENNA
SUSPENSION MEMBER
MOWING MACHINE
RECORDING AND TIME-OFFSET REPRODUCTION OF MEDIA CONTENTS
MAGNETIC LOCKING MECHANISM
Silicone hose for solving CO2 in water for algae production
INSTANT COFFEE OR COFFEE SUBSTITUTE WITH REDUCED ACRYLAMIDE AND HYDROXYMETHYL FURFURAL CONTENT AND PRODUCTION METHOD THEREOF
ADHESIVE AGENT COMPOSITION AND ADHESIVE SHEET
ORGANIC SEMICONDUCTOR COMPOSITION, ORGANIC THIN-FILM TRANSISTOR, ELECTRONIC PAPER, AND DISPLAY DEVICE
MACHINE COMPONENT MADE OF FERROUS SINTERED METAL
DRIVE FORCE TRANSMISSION UNIT, INSERTION INSTRUMENT, ROTATION UNIT, INSERTION BODY ASSEMBLY, AND INSERTION DEVICE
THICK STEEL SHEET HAVING EXCELLENT WELDING HEAT-AFFECTED PART TOUGHNESS
ONE-PIECE RETAINER FOR AN ADJUSTMENT DEVICE, ADJUSTMENT DEVICE AND METHOD FOR ASSEMBLING THE ADJUSTMENT DEVICE
POST-SYNTHETIC ORTHOGONAL AMIDATION PLUS METAL CATALYZED AZIDE-ALKYNE CYCLOADDITION CLICK CHEMISTRY ON siRNA
ADAPTIVE POWER AVAILABILITY CONTROLLER
TERMINAL, COLOUR CHANGING METHOD AND COLOUR CHANGING DEVICE
VERTICAL TAKEOFF AND LANDING AIRCRAFT
IMPROVED PEPTIDE PHARMACEUTICALS
FLUID INSULATED INJECTOR-IGNITER