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发明名称
HEATING DEVICE, SUBSTRATE PROCESSING APPARATUS, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
摘要
申请公布号
KR101096602(B1)
申请公布日期
2011.12.20
申请号
KR20100069368
申请日期
2010.07.19
申请人
发明人
分类号
H01L21/22;C23C16/46;H01L21/205;H01L21/324
主分类号
H01L21/22
代理机构
代理人
主权项
地址
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