A LARGE CURRENT AND LARGE AREA ION BEAM EXTRACTING APPARATUS FOR GENERATING AND ACCELERATING OF VARIOUS IONS WITH A LARGE UNIFORM IRRADIATION AREA

摘要

PURPOSE: A high current large area ion beam draw-out apparatus is provided to reduce production costs by constituting a simple apparatus with one ion beam. CONSTITUTION: A filament hot cathode(11) adds a heat and emits thermoelectron. A subsidiary discharge chamber(12) amplifies the number of electronics in the thermoelectron which is emitted from the filament hot cathode through first discharge. A main discharge chamber(13) sanctions a vertical magnetic field in order to form plasma. A magnetometer for plasma formation sanctions the vertical magnetic field. A beam draw-out system(15) emits an ion beam which is created from the main discharge chamber.