APPARATUS FOR DETECTING MOUNTER LEVEL OF VACUUM CHAMBER

摘要

PURPOSE: A mounter horizontality measuring apparatus for a vacuum chamber is provided to improve the reliability of a measurement result by connecting a signal integration unit and a control unit by a flat cable. CONSTITUTION: A space measurement unit(200) is composed of a transfer body(202), a linear scale(207), and a unit signal terminal(203). The linear scale measures a translation distance of the transfer body. The unit signal terminal outputs the transfer distance which is measured to a digital signal. A signal integration unit is inputted a unit signal from a plurality of unit signal terminals. A control unit indicates the transfer distance which is measured in the space measurement unit. A vertical transfer guide unit is fixed in the lower side of a bottom case and guides vertical transfer of the transfer body.