METHOD TO PRODUCE NANOCRYSTALLINE FILMS OF RUTILE

摘要

FIELD: technological processes. ^ SUBSTANCE: invention relates to a technology of production of nanocrystalline films of rutile and may be used to develop semiconductor instruments, and also in production of protective and other functional coatings. The method includes formation of a nanocrystalline film of titanium by method of magnetron spraying or electron-beam evaporation on the oxidated surface of a plate from silicon and film oxidation. Oxidation is carried out in an oxidising gas medium during pulse irradiation of the titanium film by photons using pulse xenon bulbs with the radiation range of 0.2-1.2 mcm for 1.6-1.8 s with pulse duration of 10-2 s and a dose of radiation arriving to the film equal to 230 - 260 Jcm-2 . ^ EFFECT: increased rate of oxidation, reduced thermal load at substrate, increased density of produced film. ^ 3 dwg, 1 ex