发明名称 A RESISTANCE RANDOM ACCESS MEMORY HAVING A CROSS POINT STRUCTURE, AND A METHOD FOR MANUFACTURING SAME
摘要 <p>The present invention relates to a resistance random access memory having a cross point structure, and a method for manufacturing same. The method includes: forming a p-type oxide layer by depositing at least one of PCMO(Pr1-XCaXMnO3), LCMO(La1-XCaXMnO3), and LSMO(La1-xSrxMnO3) on a substrate; forming an n-type metal layer by depositing an n-type reactive metal on the p-type oxide layer; and forming a Schottky barrier prepared by reacting the p-type oxide layer with the n-type reactive metal. According to the present invention, since a Schottky barrier is self-formed through the oxidation-reduction reaction between a p-type oxide layer having PCMO deposited thereon and an n-type meal layer having an n-type reactive metal deposited thereon, a resistance random access memory having a cross point structure is manufactured without the process for forming a transistor or a diode; and also, since additional processes for manufacturing a diode or a transistor are unnecessary, economical efficiency is high and manufacturing yield is improved.</p>
申请公布号 WO2011155678(A1) 申请公布日期 2011.12.15
申请号 WO2010KR08772 申请日期 2010.12.08
申请人 GWANGJU INSTITUTE OF SCIENCE AND TECHNOLOGY;JO, MIN-SEOK;HWANG, HYUN-SANG 发明人 JO, MIN-SEOK;HWANG, HYUN-SANG
分类号 H01L27/115 主分类号 H01L27/115
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