发明名称 |
A RESISTANCE RANDOM ACCESS MEMORY HAVING A CROSS POINT STRUCTURE, AND A METHOD FOR MANUFACTURING SAME |
摘要 |
<p>The present invention relates to a resistance random access memory having a cross point structure, and a method for manufacturing same. The method includes: forming a p-type oxide layer by depositing at least one of PCMO(Pr1-XCaXMnO3), LCMO(La1-XCaXMnO3), and LSMO(La1-xSrxMnO3) on a substrate; forming an n-type metal layer by depositing an n-type reactive metal on the p-type oxide layer; and forming a Schottky barrier prepared by reacting the p-type oxide layer with the n-type reactive metal. According to the present invention, since a Schottky barrier is self-formed through the oxidation-reduction reaction between a p-type oxide layer having PCMO deposited thereon and an n-type meal layer having an n-type reactive metal deposited thereon, a resistance random access memory having a cross point structure is manufactured without the process for forming a transistor or a diode; and also, since additional processes for manufacturing a diode or a transistor are unnecessary, economical efficiency is high and manufacturing yield is improved.</p> |
申请公布号 |
WO2011155678(A1) |
申请公布日期 |
2011.12.15 |
申请号 |
WO2010KR08772 |
申请日期 |
2010.12.08 |
申请人 |
GWANGJU INSTITUTE OF SCIENCE AND TECHNOLOGY;JO, MIN-SEOK;HWANG, HYUN-SANG |
发明人 |
JO, MIN-SEOK;HWANG, HYUN-SANG |
分类号 |
H01L27/115 |
主分类号 |
H01L27/115 |
代理机构 |
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代理人 |
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主权项 |
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