Micro-mechanical component for micro-electro-mechanical-system-microphone, has functional layer formed under hollow chamber, where hollow chamber is formed with ventilation opening for microphone structure

摘要

The component (10) has a first functional layer (1) with a sound aperture (16) that opens in a hollow chamber (11) below a first functional chamber, where the hollow chamber extends over a second functional layer (2). Membrane structures (12, 13) and acoustic inactive counter elements (14, 15) are formed in the second functional layer, so that the membrane structures are limited in the hollow chamber and are moved in a layer plane. A third functional layer (3) is formed under the hollow chamber, and a ventilation opening (17) for a microphone structure is formed in the hollow chamber.