发明名称 |
Electronic Device, Resonator, Oscillator and Method for Manufacturing Electronic Device |
摘要 |
An electronic device includes a substrate, a functional structural body formed on the substrate and a covering structure for defining a cavity part having the functional structural body disposed therein, wherein the covering structure is provided with a side wall provided on the substrate and comprising an interlayer insulating layer surrounding the cavity part and a wiring layer; a first covering layer covering an upper portion of the cavity part and having an opening penetrating through the cavity part and composed of a laminated structure including a corrosion-resistant layer; and a second covering layer for closing the opening. |
申请公布号 |
US2011303457(A1) |
申请公布日期 |
2011.12.15 |
申请号 |
US201113168561 |
申请日期 |
2011.06.24 |
申请人 |
INABA SHOGO;SATO AKIRA;SEIKO EPSON CORPORATION |
发明人 |
INABA SHOGO;SATO AKIRA |
分类号 |
H01L23/28 |
主分类号 |
H01L23/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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