METHOD OF MANUFACTURING A MICRO-ELECTRICAL-MECHANICAL SYSTEM WITH THERMALLY ISOLATED ACTIVE ELEMENTS
摘要
<p>A method of manufacturing a micro-electrical-mechanical system with thermally isolated active elements. Such a system may embody a bolometer, which is well suited for detecting electromagnetic radiation between 90 GHz and 30 THz while operating at room temperature. The method also discloses a generalized process for manufacturing circuitry incorporating active and passive micro-electrical-mechanical systems in a silicon wafer.</p>
申请公布号
EP2394274(A1)
申请公布日期
2011.12.14
申请号
EP20100739104
申请日期
2010.02.04
申请人
NORTHROP GRUMMAN SYSTEMS CORPORATION
发明人
BLUZER, NATHAN;KRISHNASWAMY, SILAI, V.;SMITH, PHILIP, C.