| 发明名称 |
Method of removing etch veils from microstructures |
| 摘要 |
A method for removing etch veils from the surface of a microstructure using a liquid spray directed at the surface. The spray pressure is sufficiently high to substantially remove the etch veils.
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| 申请公布号 |
US2004256354(A1) |
申请公布日期 |
2004.12.23 |
| 申请号 |
US20030464214 |
申请日期 |
2003.06.18 |
| 申请人 |
DINU RALUCA;KRESSBACH JEFFREY K. |
发明人 |
DINU RALUCA;KRESSBACH JEFFREY K. |
| 分类号 |
G02B6/12;G02B6/136;G02B6/138;G02F1/065;G02F1/21;H01L21/02;H01L21/311;H01L21/3213;(IPC1-7):B29D11/00 |
主分类号 |
G02B6/12 |
| 代理机构 |
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代理人 |
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