HOT PLATE FOR HOT EMBOSSING NANO IMPRINTING LITHOGRAPHY APPARATUS

摘要

PURPOSE: A thermal plate apparatus for a high temperature-embossing nano imprint lithography apparatus is provided to improve the accuracy of an imprint pattern structure by spirally arranging a heating tube and a cooling pipe. CONSTITUTION: Top and bottom thermal plate heats and cools a substrate. A thermal plate main body(10) has an empty internal space. A heating tube(21) is arranged in an internal space of the thermal plate main body and heats the substrate. A cooling tube(31) is arranged in the internal space of the thermal plate main body and cools the substrate. A transport unit(40) transfers one of the heating pipe and the cooling pipe to be closer to the substrate than the other one.