DEVICE AND METHOD FOR MEASURING MULTIPLEX WAVELENGTH RADIATION TEMPERATURE USING WAVELENGTH VARIABLE LASER RAY OSCILLATION MEANS

摘要

PURPOSE: A multi frequency radiation temperature measure system and a method using a tunable laser light vibrating member are provided to accurately measure radiation temperature of a semiconductor substrate by radiating layer beam. CONSTITUTION: A multi frequency radiation temperature measure system comprises a laser light vibrating member(100), a beam splitter(200), a first light collecting member(300), a second light collecting member(400), an optical detector(600) and a temperature calculation unit(700). The laser light vibrating member generates layer beam of specific wavelength. The first light collecting member collects radiate heat from the light, which is radiated to the semiconductor substrate. The second light collecting member condenses the heat radiant light which is condensed in the first light collecting member. The optical detector detects the signal of the heat radiant light of the specific wavelength from the signal of the heat radiant light.