MAGNETIC MULTILAYER NANO FILM FOR MAGNETIC SENSOR AND MANUFACTURING METHOD THEREOF

摘要

A magnetic multilayer nano film for a magnetic sensor and the manufacturing method thereof are provided. The multilayer film, in a following sequence, includes: a substrate, a bottom layer, a reference magnetic layer, a space layer, a detection magnetic layer and a cap layer. Said reference magnetic layer involves a pinning structure for converting the information about the rotation of the magnetic moment of the detection magnetic layer to electrical signal. Said detection magnetic layer involves a pinning structure for inducing the detected magnetic field.