| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a useful zirconia-based ceramic setter which exhibits high mechanical properties capable of functioning as a setter for firing, enables efficient removal of a binder without inhibiting optimal circulation of a reducing gas, required for the setter for remarkably downsized components, when such components are fired, and hardly reacts with electronic device components or the like during firing. <P>SOLUTION: The zirconia-based setter is constituted of partially stabilized zirconia regions having a yttrium oxide content of 2-3 mol% to zirconium oxide and stabilized zirconia regions having a yttrium oxide content of 6-10 mol% to zirconium oxide, when microscopically observed. Further, the zirconia-based setter has a plurality of through micropores, and porosity of 50-99%. <P>COPYRIGHT: (C)2012,JPO&INPIT |
