| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a MEMS switch capable of suppressing the occurrence of stiction in a conducting state and performing stable signal transmission in a conducting state. <P>SOLUTION: In a fixed terminal FT11 and a second fixed terminal FT12 of a MEMS switch 10-1, respective end edges are closest to a movable terminal MT, a portion other than the end edges forms a cross-sectional shape separated from the movable terminal MT more than the end edges, and the movable terminal MT is brought into line contact with the end edges of the first fixed terminal FT11 and the second fixed terminal FT12 in a conducting state. <P>COPYRIGHT: (C)2012,JPO&INPIT |
