发明名称 |
MINIATURE MICRO-ELECTROMECHANICAL SYSTEM (MEMS) BASED DIRECTIONAL SOUND SENSOR |
摘要 |
A micro-electromechanical (MEMS) based directional sound sensor includes a two sensor wings attached to a surrounding support structure by two legs. The support structure is hollow beneath the sensor wings allowing the sensor wings to vibrate in response to sound excitation. In one embodiment, interdigitated comb finger capacitors attached on the sensor wing edges and the support structure enable an electrostatic (capacitive) readout related to the vibrations of the sensor which allows determination of the sound direction.
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申请公布号 |
US2011299701(A1) |
申请公布日期 |
2011.12.08 |
申请号 |
US20100756040 |
申请日期 |
2010.04.07 |
申请人 |
KARUNASIRI GAMANI;SINIBALDI JOSE |
发明人 |
KARUNASIRI GAMANI;SINIBALDI JOSE |
分类号 |
H04R3/00;H01L21/02 |
主分类号 |
H04R3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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