Method for performing adaptive quality inspection of silicon wafers, involves performing sampling group test on wafer lots/production units having measurement value measured in signature group test, between inner and outer limits

摘要

#CMT# #/CMT# The wafer lots/production units subjected to series of function tests are passed through a signature group test (7). A measurement value indicating whether each production unit is in good/defective condition is output in each test or group of tests. The production unit having measurement value that lies outside an outer limit is rejected while production unit having measurement value that lies inside inner limit is passed to next signature group test (8). The production unit having measurement value between inner and outer limits is subjected to sampling group tests (9-12). #CMT# : #/CMT# Independent claims are included for the following: (1) system for performing adaptive quality inspection of silicon wafer; and (2) computer program product for performing adaptive quality inspection of silicon wafer. #CMT#USE : #/CMT# Method for performing adaptive quality inspection of silicon wafers. #CMT#ADVANTAGE : #/CMT# Since the sampling group test is performed on wafer lots/production units that have measurement value measured in signature group test, between inner and outer limits, the deterioration of the test results can be prevented and the manufacturing time and cost can be reduced without reducing quality of the wafer. Hence productivity is improved. #CMT#DESCRIPTION OF DRAWINGS : #/CMT# The drawing shows a flowchart illustrating the process for performing adaptive quality inspection of silicon wafers. 7,8 : Signature group tests 9-12 : Sampling group tests.