| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a work transfer system with aligner, capable of improving position precision during work transfer using a work transfer robot. <P>SOLUTION: A work transfer system A1 includes a transfer chamber 2; a work storage chamber 1 for storing laminated works W; a work processing chamber adjacent to the transfer chamber 2; a transfer robot 4 for transferring works W between the work storage chamber 1 and the work processing chamber; and an aligner 6 for aligning a rotational position around a vertical axis O4 of the work W. The aligner 6 includes a work retaining part 62 for retaining works W, a rotation driving mechanism for rotating the work retaining part 62, and a work retaining part lifting mechanism for lifting the work retaining part 62. Exchanging of works with the aligner 6 is possible by lifting the work retaining part 62; therefore, a lifting stroke of the transfer robot 4 can be relatively shortened. <P>COPYRIGHT: (C)2012,JPO&INPIT |
