摘要 |
<P>PROBLEM TO BE SOLVED: To provide a temperature sensor having a temperature sensing element of low thermal expansion which can prevent a disconnection in the temperature sensor and is excellent in reliability under wide range environment and can be manufactured at a low cost. <P>SOLUTION: The temperature sensor 1 includes: a temperature sensing element 2, whose electric characteristic is changed with temperature, consisting of low thermal expansion ceramics having linear expansion coefficients of 3×10<SP POS="POST">-6</SP>to 5×10<SP POS="POST">-6</SP>/°C; a pair of electrode films 20 prepared on the surface of the temperature sensing element; and a pair of lead wires 21 joined to the electrode films 20 while having the linear expansion coefficients of 15×10<SP POS="POST">-6</SP>or smaller. When the liner expansion coefficients of the temperature sensing element 2, the electrode films 20 and lead wires 21 are respectively expressed as T<SB POS="POST">a</SB>, T<SB POS="POST">b</SB>and T<SB POS="POST">d</SB>, the temperature sensor 1 satisfies a relation of T<SB POS="POST">a</SB>≥T<SB POS="POST">b</SB>≥T<SB POS="POST">d</SB>. <P>COPYRIGHT: (C)2012,JPO&INPIT |