SUBSTRATE PROCESSING APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a substrate processing apparatus which prevents its transfer device from degrading detection accuracy in an accelerating region.

SOLUTION: A transmission type optical sensor for detecting a wafer is mounted in horizontally outward direction on a transfer device. The transmission type optical sensor is constituted in such a manner that light emitted from a light projecting element to the wafer and transmitting the wafer is received by a light receiving element. The transmission type optical sensor is connected to a PLC which is connected to a servomotor of a transfer elevator. The PLC detects the position of the wafer in a pod according to a wafer detecting signal from the transmission type optical sensor and according to a position signal of the transfer elevator. The PLC also decides a uniform speed region of the transfer device when it moves upwardly/downwardly against the pod according to rotation speed signal from the servomotor.

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