| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a stamper excellent in detachability and durability. <P>SOLUTION: In the stamper forming method, a master disk which comprises a substrate, a conductive underlayer having catalytic activity, and convex patterns which do not have catalytic activity being formed in sequence, and which has regions where the conductive underlayer having catalytic activity is exposed, is used. An amorphous conductive layer is deposited by electroless plating among the convex patterns and on the regions where the conductive underlayer is exposed, to form stamper protrusions. With the amorphous conductive layer and the conductive underlayer as electrodes, the convex patterns and the stamper protrusions formed of the amorphous conductive layer are electroplated to form a stamper body composed of crystalline metal. And then a stamper comprising the stamper protrusions and the stamper body is detached from the master disk. <P>COPYRIGHT: (C)2012,JPO&INPIT |
