APPARATUS FOR FORMING METAL OXIDE FILM, METHOD FOR FORMING METAL OXIDE FILM, AND METAL OXIDE FILM

摘要

A film forming apparatus (100) according to one embodiment of the present invention comprises a first solution container (5A), a second solution container (5B), a reaction container (1), a first pathway (L1) and a second pathway (L2). The first solution container (5A) holds a starting material solution (10) that contains a metal. The second solution container (5B) holds hydrogen peroxide. A substrate (2) is placed in the reaction container (1), and the reaction container (1) has a heater (3) for heating the substrate. The first pathway (L1) supplies the starting material solution (10) from the first solution container (5A) to the reaction container (1). The second pathway (L2) supplies the hydrogen peroxide from the second solution container (5B) to the reaction container (1).