发明名称 |
Vacuum Processing Apparatus And Vacuum Processing Method |
摘要 |
A vacuum processing apparatus includes vacuum processing chambers for subjecting a sample to vacuum processing, a vacuum carriage, a switchable chamber, a cassette support for supporting a plurality of cassettes capable of housing samples, and a waiting cassette support for supporting a waiting cassette that differs from the cassettes supported on the cassette support and capable of having a number of samples. An atmospheric carriage enables carrying a sample among a given cassette of the plurality of cassettes or the waiting cassette. A controller effects control for carrying unprocessed and processed samples among the given cassette, the waiting cassette and the vacuum processing chamber, so that a mixture of both processed and unprocessed samples does not exist in the given cassette or the waiting cassette.
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申请公布号 |
US2011299962(A1) |
申请公布日期 |
2011.12.08 |
申请号 |
US201113209871 |
申请日期 |
2011.08.15 |
申请人 |
OONO TAKESHI;NAKATA KENJI;OKIGUCHI SHOJI;UENO TOORU;OOMAE HIDEHIRO;MINAMI SHIGEHARU;KAI YOSHITAKA |
发明人 |
OONO TAKESHI;NAKATA KENJI;OKIGUCHI SHOJI;UENO TOORU;OOMAE HIDEHIRO;MINAMI SHIGEHARU;KAI YOSHITAKA |
分类号 |
H01L21/3065;H01L21/677;B65G1/00;H01L21/00;H01L21/673;H01L21/68 |
主分类号 |
H01L21/3065 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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