SILICON CARBIDE POLISHING METHOD UTILIZING WATER-SOLUBLE OXIDIZERS,申请号EP20090716527-传众专利搜索

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发明名称	SILICON CARBIDE POLISHING METHOD UTILIZING WATER-SOLUBLE OXIDIZERS
摘要
申请公布号	EP2255379(A4)	申请公布日期	2011.12.07
申请号	EP20090716527	申请日期	2009.03.02
申请人	CABOT MICROELECTRONICS CORPORATION	发明人	WHITE, MICHAEL;JONES, LAMON;GILLILAND, JEFFREY;MOEGGENBORG, KEVIN
分类号	H01L21/304;C09G1/02;C09K3/14;H01L21/04	主分类号	H01L21/304
代理机构		代理人
主权项
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