发明名称 |
Composition for metal electroplating comprising leveling agent |
摘要 |
<p>A composition comprising a source of metal ions and at least one leveling agent comprising a linear or branched, polymeric imidazolium compound comprising the structural unit of formula L1
wherein
R 1 , R 2 , R 3
are each independently selected from an H atom and an organic radical having from 1 to 20 carbon atoms,
R 4
is a divalent, trivalent or mutlivalent organic radical which does not comprise a hydroxyl group in the ± or ² position relative to the nitrogen atom of the imidazole rings.
n
is an integer.</p> |
申请公布号 |
EP2392692(A1) |
申请公布日期 |
2011.12.07 |
申请号 |
EP20100164610 |
申请日期 |
2010.06.01 |
申请人 |
BASF SE |
发明人 |
SIEMER, MICHAEL;ROEGER, CORNELIA;MEIER, NICOLE;RAETHER, ROMAN BENEDIKT;ARNOLD, MARCO;EMNET, CHARLOTTE;MAYER, DIETER;FLUEGEL, ALEXANDER |
分类号 |
C23C18/31;C08G12/06;C08G73/06;C23C18/38;C25D3/02;C25D3/38;H01L21/288 |
主分类号 |
C23C18/31 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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