发明名称 Composition for metal electroplating comprising leveling agent
摘要 <p>A composition comprising a source of metal ions and at least one leveling agent comprising a linear or branched, polymeric imidazolium compound comprising the structural unit of formula L1 wherein R 1 , R 2 , R 3 are each independently selected from an H atom and an organic radical having from 1 to 20 carbon atoms, R 4 is a divalent, trivalent or mutlivalent organic radical which does not comprise a hydroxyl group in the ± or ² position relative to the nitrogen atom of the imidazole rings. n is an integer.</p>
申请公布号 EP2392692(A1) 申请公布日期 2011.12.07
申请号 EP20100164610 申请日期 2010.06.01
申请人 BASF SE 发明人 SIEMER, MICHAEL;ROEGER, CORNELIA;MEIER, NICOLE;RAETHER, ROMAN BENEDIKT;ARNOLD, MARCO;EMNET, CHARLOTTE;MAYER, DIETER;FLUEGEL, ALEXANDER
分类号 C23C18/31;C08G12/06;C08G73/06;C23C18/38;C25D3/02;C25D3/38;H01L21/288 主分类号 C23C18/31
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