Fabrication method of cross type phase change device using 3-dimensional imprint and lift off process and the cross type phase change device manufactured by the method,申请号KR20090048612-传众专利搜索

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发明名称	Fabrication method of cross type phase change device using 3-dimensional imprint and lift off process and the cross type phase change device manufactured by the method
摘要
申请公布号	KR101089396(B1)	申请公布日期	2011.12.07
申请号	KR20090048612	申请日期	2009.06.02
申请人		发明人
分类号	H01L21/8247;H01L21/027;H01L27/115	主分类号	H01L21/8247
代理机构		代理人
主权项
地址

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