发明名称 |
Charged particle beam alignment method and charged particle beam apparatus |
摘要 |
<p>An object of the present invention is to provide a charged particle beam apparatus and an alignment method of the charged particle beam apparatus, which make it possible to align an optical axis of a charged particle beam easily even when a state of the charged particle beam changes. The present invention comprises calculation means for calculating a deflection amount of an alignment deflector which performs an axis alignment for an objective lens, a plurality of calculation methods for calculating the deflection amount is memorized in the calculation means, and a selection means for selecting at least one of the calculation methods is provided.
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申请公布号 |
EP2309530(A3) |
申请公布日期 |
2011.12.07 |
申请号 |
EP20100012302 |
申请日期 |
2002.05.21 |
申请人 |
HITACHI, LTD. |
发明人 |
SATO, MITSUGU;OTAKA, TADASHI;EZUMI, MAKOTO;TAKANE, ATSUSHI;YOSHIDA, SHOJI;YAMAGUCHI, SATORU;OZAWA, YASUHIKO |
分类号 |
H01J37/147;H01J37/28 |
主分类号 |
H01J37/147 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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