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发明名称
POINT OF USE RECYCLING SYSTEM FOR CMP SLURRY
摘要
申请公布号
KR20110132458(A)
申请公布日期
2011.12.07
申请号
KR20117025013
申请日期
2010.03.23
申请人
APPLIED MATERIALS, INC.
发明人
NEUBER ANDREAS;CHANDLER PHIL;STOW CLIFF;CLARK DANIEL O.;KIEFER MICHAEL;LEIGHTON JAMIE
分类号
H01L21/304;B24B57/02
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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