SEMICONDUCTOR DEVICE TO MINIMIZE CROSS COUPLING

摘要

PURPOSE: A semiconductor apparatus capable of minimizing a cross coupling phenomenon is provided to arrange a penetration silicon via for power supplying to the surrounding area of a clock system penetration silicon via, thereby supplying a high quality clock signal to the semiconductor apparatus by reducing cross coupling noise. CONSTITUTION: A functional part(501) performs an intrinsic function of a semiconductor apparatus. A plurality of signaling penetration silicon via(502) passes a signal which is communicated with the functional part. A plurality of power supply penetration silicon via(503) supplies power. A clock system penetration silicon via(504) passes a clock signal. The power supply penetration silicon via is arranged in a near distance of the clock system penetration silicon via.