| 摘要 |
A spherical aberration correction mechanism includes a plurality of aberration correction lenses, a movable portion in which the aberration correction lens is held, a fixed portion in which the movable portion is arranged so as to be slidable as well as the aberration correction lens is held, a shaft supporting the movable portion so as to be rotatable about the axis as well as to be slidable in the axial direction, a feed screw having spiral grooves, an engaging portion having convex portions to be engaged with the spiral grooves from one direction and a coil spring fitted to the outside of the shaft, pressing the movable portion in the axial direction. The coil spring has a rotation prevention portion engaged with the fixed portion and a torque biasing portion engaged with the movable portion, and the coil spring is installed in a twisted state in advance. |
