发明名称 |
Solid immersion lens optics assembly |
摘要 |
A solid immersion lens optics assembly, a test station for probing and testing of integrated circuits on a semiconductor wafer, and a method of landing a SIL on an object. The optics assembly comprises an objective lens housing for receiving an objective lens, and a solid immersion lens (SIL) housing for mounting an SIL and adapted for connection to the objective lens housing; wherein a peripheral wall of the SIL housing comprises an integrated spring section adapted to provide a biased support for the SIL. |
申请公布号 |
US8072699(B2) |
申请公布日期 |
2011.12.06 |
申请号 |
US20090486509 |
申请日期 |
2009.06.17 |
申请人 |
KOH LIAN SER;CHUA CHOON MENG;CHUA WAH PHENG;PHANG CHEE HONG JACOB;TAN SOON HUAT;SEMICAPS PTE LTD |
发明人 |
KOH LIAN SER;CHUA CHOON MENG;CHUA WAH PHENG;PHANG CHEE HONG JACOB;TAN SOON HUAT |
分类号 |
G02B7/02;G02B21/00 |
主分类号 |
G02B7/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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