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发明名称
PLASMA OXIDIZING METHOD, PLASMA PROCESSING APPARATUS, AND STORAGE MEDIUM
摘要
申请公布号
KR101089988(B1)
申请公布日期
2011.12.05
申请号
KR20097006327
申请日期
2007.09.27
申请人
发明人
分类号
H01L21/316;H01L21/205;H01L21/76
主分类号
H01L21/316
代理机构
代理人
主权项
地址
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